Oil Free High Speed High Vacuum Dry Pump

Oil Free High Speed High Vacuum Dry Pump

Large speed turbo vacuum pump

one.High pace turbo vacuum pump(600L/S) is immediately outfitted into a station as photograph demonstrate for max. vacuum amount
two.Large duty dual phase mechanical pump, 220 liters/minute (seven.8CFM) is related to turbo pump for quicker pumping velocity
3.Cellular pump station is provided and the compact sputtering coater can be positioned on prime of station
4.Max. vacuum degree: ten^-six torr with chamber baking

 

Product FF-a hundred and sixty
Pumping Velocity(/l/s,Air) 600
Inlet Flange DN160 ISO-K
Outlet Flange KF forty (DN)
Final Vacuum(Pa) ≤ 6×10-4Pa
Rotation Speed(rpm) 36000
Operate-Up Time(min.) < 6
Bearing Kind Ceramic
VIB(um) ≤ 0.1
Backing Pump (l/s) four-eight
CZPT Method,optional Water
CZPT Drinking water Temperature(ºC) ≤ 25
Bake-out temperature(ºC) ≤ 100
Ambient Temperature (ºC) S-40
CZPT Oil
Mounting or lentation Vertical ±5°

 

Oil Free High Speed High Vacuum Dry Pump